Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode

Bem, Natã F.S. de ; Ruppert, Michael G. ; Fleming, Andrew J. ; Yong, Yuen K.

Sensors and actuators. A. Physical., 2022-05, Vol.338, p.113496, Article 113496 [Periódico revisado por pares]

Lausanne: Elsevier B.V

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