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Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection

Burg, T.P. ; Mirza, A.R. ; Milovic, N. ; Tsau, C.H. ; Popescu, G.A. ; Foster, J.S. ; Manalis, S.R.

Journal of microelectromechanical systems, 2006-12, Vol.15 (6), p.1466-1476 [Periódico revisado por pares]

New York, NY: IEEE

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Título:
Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection
Autor: Burg, T.P. ; Mirza, A.R. ; Milovic, N. ; Tsau, C.H. ; Popescu, G.A. ; Foster, J.S. ; Manalis, S.R.
Assuntos: Applied fluid mechanics ; Applied sciences ; Biomedical transducers ; Biomolecules ; Biosensors ; Channels ; chemical transducers ; Densitometers ; density measurement ; Exact sciences and technology ; Fabrication ; Fluid dynamics ; Fluidics ; Fundamental areas of phenomenology (including applications) ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Liquids ; mass sensor ; Mechanical engineering. Machine design ; Mechanical instruments, equipment and techniques ; microbalance ; Microchannel ; Microchannels ; Micromechanical devices and systems ; Molecular biophysics ; Molecules ; Packaging ; Physics ; Precision engineering, watch making ; Proteins ; Q factor ; Quality factor ; Resonance ; Resonators ; Sensor phenomena and characterization ; Sensors ; Silicon nitride ; Testing ; vacuum packaging
É parte de: Journal of microelectromechanical systems, 2006-12, Vol.15 (6), p.1466-1476
Notas: ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
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Descrição: There is a great need in experimental biology for tools to study interactions between biological molecules and to profile expression levels of large numbers of proteins. This paper describes the fabrication, packaging and testing of a resonant mass sensor for the detection of biomolecules in a microfluidic format. The transducer employs a suspended microchannel as the resonating element, thereby avoiding the problems of damping and viscous drag that normally degrade the sensitivity of resonant sensors in liquid. Our device differs from a vibrating tube densitometer in that the channel is very thin, which enables the detection of molecules that bind to the channel walls; this provides a path to specificity via molecular recognition by immobilized receptors. The fabrication is based on a sacrificial polysilicon process with low-stress low-pressure chemical-vapor deposited (LPCVD) silicon nitride as the structural material, and the resonator is vacuum packaged on the wafer scale using glass frit bonding. Packaged resonators exhibit a sensitivity of 0.8 ppm/(ngmiddotcm 2 ) and a mechanical quality factor of up to 700. To the best of our knowledge, this quality factor is among the highest so far reported for resonant sensors with comparable surface mass sensitivity in liquid
Editor: New York, NY: IEEE
Idioma: Inglês

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Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection

Burg, T.P. ; Mirza, A.R. ; Milovic, N. ; Tsau, C.H. ; Popescu, G.A. ; Foster, J.S. ; Manalis, S.R.

New York, NY: IEEE

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