Dynamic analytical modelling and piezoelectric characterization of a Pb(Zr, Ti)O 3 /SiN cantilever with losses

Arndt, G ; Defay, E ; Le Rhun, G ; Rey, P ; Perruchot, F ; Aid, M ; Liu, L ; Miller, M

Journal of micromechanics and microengineering, 2010-11, Vol.20 (11), p.115019 [Periódico revisado por pares]

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