Mode transitions and hysteresis in inductively coupled plasmas

Daltrini, A M ; Moshkalev, S A ; Monteiro, M J. R ; Besseler, E ; Kostryukov, A ; Machida, M

Journal of applied physics, 2007-04, Vol.101 (7), p.073309-073309-6 [Periódico revisado por pares]

United States: American Institute of Physics

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