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Facility for combined in situ magnetron sputtering and soft x-ray magnetic circular dichroism

Telling, N. D. ; van der Laan, G. ; Georgieva, M. T. ; Farley, N. R. S.

Review of scientific instruments, 2006-07, Vol.77 (7) [Periódico revisado por pares]

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Título:
Facility for combined in situ magnetron sputtering and soft x-ray magnetic circular dichroism
Autor: Telling, N. D. ; van der Laan, G. ; Georgieva, M. T. ; Farley, N. R. S.
Assuntos: ABSORPTION SPECTROSCOPY ; COBALT ; ELECTROMAGNETS ; EVAPORATION ; FERROMAGNETIC MATERIALS ; IRON ; MAGNETIC CIRCULAR DICHROISM ; MAGNETIC MOMENTS ; MAGNETRONS ; MATERIALS SCIENCE ; SOFT X RADIATION ; SPUTTERING ; THIN FILMS ; X-RAY SPECTRA ; X-RAY SPECTROSCOPY
É parte de: Review of scientific instruments, 2006-07, Vol.77 (7)
Descrição: An ultrahigh vacuum chamber that enables the in situ growth of thin films and multilayers by magnetron sputtering techniques is described. Following film preparation, x-ray absorption spectroscopy (XAS) and x-ray magnetic circular dichroism (XMCD) measurements are performed by utilizing an in vacuum electromagnet. XMCD measurements on sputtered thin films of Fe and Co yield spin and orbital moments that are consistent with those obtained previously on films measured in transmission geometry and grown in situ by evaporation methods. Thin films of FeN prepared by reactive sputtering are also examined and reveal an apparent enhancement in the orbital moment for low N content samples. The advantages of producing samples for in situ XAS and XMCD studies by magnetron sputtering are discussed.
Editor: United States
Idioma: Inglês

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