New fabrication process for Josephson tunnel junctions using photosensitive polyimide insulation layer for superconducting integrated circuits

Kikuchi, K. ; Segawa, S. ; Eun-Sil Jung ; Nakagawa, H. ; Tokoro, K. ; Itatani, H. ; Aoyagi, M.

IEEE transactions on applied superconductivity, 2003-06, Vol.13 (2), p.119-122 [Periódico revisado por pares]

New York, NY: IEEE

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