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Material Type: Article
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The Effect on the Interface and Reliability of SiC MOS by Ar/O2 Annealing
Luo, Zhi Peng ; Wan, Cai Ping ; Xia, Jing Hua ; Jin, Zhi ; Xu, Heng Yu
Materials science forum, 2020-11, Vol.1014, p.102-108
[Peer Reviewed Journal] Pfaffikon: Trans Tech Publications Ltd
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