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High-G MEMS Accelerometer with Cross-Symmetric Structures
High-G MEMS Accelerometer with Cross-Symmetric Structures
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High-G MEMS Accelerometer with Cross-Symmetric Structures

Choi, Y. ; Seok, M. ; Yoon, S.-H. ; Uhm, W.-Y. ; Jang, J. ; Cho, Y. ; Cho, Y.-H.

IEEE sensors journal, 2024-01, Vol.24 (2), p.1-1 [Periódico revisado por pares]

New York: IEEE

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2
Single-Wafer-Processed Self-Testable High-[Formula Omitted] Accelerometers With Both Sensing and Actuating Elements Integrated on Trench-Sidewall
Single-Wafer-Processed Self-Testable High-[Formula Omitted] Accelerometers With Both Sensing and Actuating Elements Integrated on Trench-Sidewall
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Single-Wafer-Processed Self-Testable High-[Formula Omitted] Accelerometers With Both Sensing and Actuating Elements Integrated on Trench-Sidewall

Li, Xinxin ; Lei, Gu ; Wang, Yuelin ; Yang, Heng

IEEE sensors journal, 2008-12, Vol.8 (12), p.1992-1999 [Periódico revisado por pares]

New York: The Institute of Electrical and Electronics Engineers, Inc. (IEEE)

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3
Electromechanical Sig-Delta Modulators ([Formula Omitted]) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review
Electromechanical Sig-Delta Modulators ([Formula Omitted]) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review
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Electromechanical Sig-Delta Modulators ([Formula Omitted]) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

Chen, Fang ; Li, Xinxin ; Kraft, Michael

IEEE sensors journal, 2016-01, Vol.16 (17), p.6476 [Periódico revisado por pares]

New York: The Institute of Electrical and Electronics Engineers, Inc. (IEEE)

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4
Thermal Stress Resistance for the Structure of MEMS-Based Silicon Differential Resonant Accelerometer
Thermal Stress Resistance for the Structure of MEMS-Based Silicon Differential Resonant Accelerometer
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Thermal Stress Resistance for the Structure of MEMS-Based Silicon Differential Resonant Accelerometer

Zhang, Jing ; Wu, Tianhao ; Liu, Yudong ; Lin, Chen ; Su, Yan

IEEE sensors journal, 2023-05, Vol.23 (9), p.1-1 [Periódico revisado por pares]

New York: IEEE

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5
A Background Test and Calibration Technique of Nonlinear Mismatches in MEMS Oscillating Accelerometers
A Background Test and Calibration Technique of Nonlinear Mismatches in MEMS Oscillating Accelerometers
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A Background Test and Calibration Technique of Nonlinear Mismatches in MEMS Oscillating Accelerometers

Cai, Siqi ; Zhang, Wenhui ; Sun, Tao ; Yu, Chencheng ; Jiang, Jinling ; Cai, Bin ; Qian, Jiuchao ; Zhang, Jing ; Su, Yan ; Zhao, Jian

IEEE sensors journal, 2023-04, Vol.23 (7), p.1-1 [Periódico revisado por pares]

New York: IEEE

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6
Broadband Optomechanical Accelerometer Reaching the Thermomechanical Limit Based on Suspended Si3N4 Membrane Resonator
Broadband Optomechanical Accelerometer Reaching the Thermomechanical Limit Based on Suspended Si3N4 Membrane Resonator
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Broadband Optomechanical Accelerometer Reaching the Thermomechanical Limit Based on Suspended Si3N4 Membrane Resonator

Li, Wei ; Liu, Wenyao ; Liu, Chenxi ; Gu, Yanxia ; Liu, Lai ; Zhou, Yanru ; Xing, Enbo ; Shi, Yunbo ; Tang, Jun ; Liu, Jun

IEEE sensors journal, 2024-04, p.1-1 [Periódico revisado por pares]

IEEE

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7
High-Temperature SiC Piezoresistive Accelerometer Fabricated by Femtosecond Laser
High-Temperature SiC Piezoresistive Accelerometer Fabricated by Femtosecond Laser
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High-Temperature SiC Piezoresistive Accelerometer Fabricated by Femtosecond Laser

Yang, Yu ; Zhao, You ; Wang, Lukang ; Wang, Yabing ; Guo, Xinliang ; Cai, Yongkang ; Zhang, Manman ; Zhao, Yulong

IEEE sensors journal, 2024-03, p.1-1 [Periódico revisado por pares]

IEEE

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8
Investigation and Experiment of High Shock Packaging Technology for High-G MEMS Accelerometer
Investigation and Experiment of High Shock Packaging Technology for High-G MEMS Accelerometer
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Investigation and Experiment of High Shock Packaging Technology for High-G MEMS Accelerometer

Shi, Yunbo ; Wen, Xiaojie ; Zhao, Yongqi ; Zhao, Rui ; Cao, Huiliang ; Liu, Jun

IEEE sensors journal, 2020-08, Vol.20 (16), p.9029-9037 [Periódico revisado por pares]

New York: IEEE

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9
A Triaxial Accelerometer Based on Differential Resonant Beams and Force-Balanced Capacitive Plates
A Triaxial Accelerometer Based on Differential Resonant Beams and Force-Balanced Capacitive Plates
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A Triaxial Accelerometer Based on Differential Resonant Beams and Force-Balanced Capacitive Plates

Han, Jianqiang ; Zhu, Yongsheng ; Tao, Gonghao ; Zhao, Zhengqian ; Yin, Yijun ; Niu, Wenju ; Dong, Lizhen

IEEE sensors journal, 2019-08, Vol.19 (16), p.6602-6609 [Periódico revisado por pares]

IEEE

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10
Design and development of ultra-low-power MEMS lead-free piezoelectric accelerometer digital system for unmanned aerial vehicle motor monitoring
Design and development of ultra-low-power MEMS lead-free piezoelectric accelerometer digital system for unmanned aerial vehicle motor monitoring
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Design and development of ultra-low-power MEMS lead-free piezoelectric accelerometer digital system for unmanned aerial vehicle motor monitoring

Li, Cheng-Ying ; Chang, Soon-Jyh ; Weng, Rui-Tong ; Ciou, Sin-Yu ; Chen, Ze-Hui ; Hsiao, Po-Yu ; Huang, Yen-Hsiang ; Wang, Ting-Jui ; Lee, Yi-Chia ; Liu, Yun-Hui ; Tsai, Cheng-Che ; Sheng-Yuan

IEEE sensors journal, 2023-07, p.1-1 [Periódico revisado por pares]

IEEE

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