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Investigation of porosity and atmospheric gas diffusion in microcrystalline silicon fabricated at high growth ratesMichard, S ; Meier, M ; Zastrow, U ; Astakhov, O ; Finger, FCanadian journal of physics, 2014-07, Vol.92 (7), p.774-777 [Periódico revisado por pares]Ottawa: NRC Research PressTexto completo disponível |