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1
The effects of oxygen plasma and humidity on surface roughness, water contact angle and hardness of silicon, silicon dioxide and glass
The effects of oxygen plasma and humidity on surface roughness, water contact angle and hardness of silicon, silicon dioxide and glass
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The effects of oxygen plasma and humidity on surface roughness, water contact angle and hardness of silicon, silicon dioxide and glass

Alam, A U ; Howlader, M M R ; Deen, M J

Journal of micromechanics and microengineering, 2014-03, Vol.24 (3), p.35010-14 [Periódico revisado por pares]

Bristol: IOP Publishing

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2
MEMS magnetic field sensor based on magnetoelectric composites
MEMS magnetic field sensor based on magnetoelectric composites
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MEMS magnetic field sensor based on magnetoelectric composites

Marauska, Stephan ; Jahns, Robert ; Greve, Henry ; Quandt, Eckhard ; Knöchel, Reinhard ; Wagner, Bernhard

Journal of micromechanics and microengineering, 2012-06, Vol.22 (6), p.65024-6 [Periódico revisado por pares]

Bristol: IOP Publishing

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3
Partially flexible MEMS neural probe composed of polyimide and sucrose gel for reducing brain damage during and after implantation
Partially flexible MEMS neural probe composed of polyimide and sucrose gel for reducing brain damage during and after implantation
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Partially flexible MEMS neural probe composed of polyimide and sucrose gel for reducing brain damage during and after implantation

Jeon, Myounggun ; Cho, Jeiwon ; Kim, Yun Kyung ; Jung, Dahee ; Yoon, Eui-Sung ; Shin, Sehyun ; Cho, Il-Joo

Journal of micromechanics and microengineering, 2014-02, Vol.24 (2), p.25010-10 [Periódico revisado por pares]

Bristol: IOP Publishing

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4
Thermal performance of a flat polymer heat pipe heat spreader under high acceleration
Thermal performance of a flat polymer heat pipe heat spreader under high acceleration
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Thermal performance of a flat polymer heat pipe heat spreader under high acceleration

Oshman, Christopher ; Li, Qian ; Liew, Li-Anne ; Yang, Ronggui ; Lee, Y C ; Bright, Victor M ; Sharar, Darin J ; Jankowski, Nicholas R ; Morgan, Brian C

Journal of micromechanics and microengineering, 2012-04, Vol.22 (4), p.45018-12 [Periódico revisado por pares]

Bristol: IOP Publishing

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5
Sharp tipped plastic hollow microneedle array by microinjection moulding
Sharp tipped plastic hollow microneedle array by microinjection moulding
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Sharp tipped plastic hollow microneedle array by microinjection moulding

Yung, K L ; Xu, Yan ; Kang, Chunlei ; Liu, H ; Tam, K F ; Ko, S M ; Kwan, F Y ; Lee, Thomas M H

Journal of micromechanics and microengineering, 2012-01, Vol.22 (1), p.015016-10 [Periódico revisado por pares]

Bristol: IOP Publishing

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6
Dry adhesive bonding of nanoporous inorganic membranes to microfluidic devices using the OSTE(+) dual-cure polymer
Dry adhesive bonding of nanoporous inorganic membranes to microfluidic devices using the OSTE(+) dual-cure polymer
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Dry adhesive bonding of nanoporous inorganic membranes to microfluidic devices using the OSTE(+) dual-cure polymer

Saharil, Farizah ; Forsberg, Fredrik ; Liu, Yitong ; Bettotti, Paolo ; Kumar, Neeraj ; Niklaus, Frank ; Haraldsson, Tommy ; van der Wijngaart, Wouter ; Gylfason, Kristinn B

Journal of micromechanics and microengineering, 2013-02, Vol.23 (2), p.25021-8 [Periódico revisado por pares]

Bristol: IOP Publishing

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7
Hypodermic-Needle-Like Hollow Polymer Microneedle Array: Fabrication and Characterization
Hypodermic-Needle-Like Hollow Polymer Microneedle Array: Fabrication and Characterization
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Hypodermic-Needle-Like Hollow Polymer Microneedle Array: Fabrication and Characterization

Po-Chun Wang ; Seung-Joon Paik ; Seong-Hyok Kim ; Allen, Mark G.

Journal of microelectromechanical systems, 2014-08, Vol.23 (4), p.991-998 [Periódico revisado por pares]

New York, NY: IEEE

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8
Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of 'friction polymer' on the contacts
Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of 'friction polymer' on the contacts
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Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of 'friction polymer' on the contacts

Czaplewski, David A ; Nordquist, Christopher D ; Dyck, Christopher W ; Patrizi, Gary A ; Kraus, Garth M ; Cowan, William D

Journal of micromechanics and microengineering, 2012-10, Vol.22 (10), p.105005-12 [Periódico revisado por pares]

Bristol: IOP Publishing

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9
Surface-Micromachined CMUT Using Low-Temperature Deposited Silicon Carbide Membranes for Above-IC Integration
Surface-Micromachined CMUT Using Low-Temperature Deposited Silicon Carbide Membranes for Above-IC Integration
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Surface-Micromachined CMUT Using Low-Temperature Deposited Silicon Carbide Membranes for Above-IC Integration

Qing Zhang ; Cicek, Paul-Vahe ; Allidina, Karim ; Nabki, Frederic ; El-Gamal, Mourad N.

Journal of microelectromechanical systems, 2014-04, Vol.23 (2), p.482-493 [Periódico revisado por pares]

New York, NY: IEEE

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10
A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications
A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications
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A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications

Kottapalli, A G P ; Tan, C W ; Olfatnia, M ; Miao, J M ; Barbastathis, G ; Triantafyllou, M

Journal of micromechanics and microengineering, 2011-08, Vol.21 (8), p.085006-11 [Periódico revisado por pares]

Bristol: IOP Publishing

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