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Quasi Two-Dimensional Si-O Superlattices: Atomically Controlled Growth and Electrical Properties
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Artigo
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Quasi Two-Dimensional Si-O Superlattices: Atomically Controlled Growth and Electrical Properties

Jayachandran, Suseendran ; Simoen, Eddy ; Martens, Koen ; Meersschaut, Johan ; Bender, Hugo ; Caymax, Matty ; Vandervorst, Wilfried ; Heyns, Marc ; Delabie, Annelies

ECS journal of solid state science and technology, 2016-01, Vol.5 (7), p.P396-P403 [Periódico revisado por pares]

The Electrochemical Society

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Source/Drain Materials for Ge nMOS Devices: Phosphorus Activation in Epitaxial Si, Ge, Ge1−xSnx and SiyGe1−x−ySnx
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Source/Drain Materials for Ge nMOS Devices: Phosphorus Activation in Epitaxial Si, Ge, Ge1−xSnx and SiyGe1−x−ySnx

Vohra, Anurag ; Makkonen, Ilja ; Pourtois, Geoffrey ; Slotte, Jonatan ; Porret, Clement ; Rosseel, Erik ; Khanam, Afrina ; Tirrito, Matteo ; Douhard, Bastien ; Loo, Roger ; Vandervorst, Wilfried

ECS journal of solid state science and technology, 2020-05, Vol.9 (4) [Periódico revisado por pares]

IOP Publishing

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