Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
---|---|---|---|
1 |
Material Type: Artigo
|
Vertically high-density interconnection for mobile applicationKatahira, Takayoshi ; Kartio, Ilkka ; Segawa, Hiroshi ; Takahashi, Michimasa ; Sagisaka, KatsumiMicroelectronics and reliability, 2006-05, Vol.46 (5), p.756-762 [Periódico revisado por pares]Oxford: Elsevier LtdTexto completo disponível |
|
2 |
Material Type: Artigo
|
Nanometer-scale lithography on the oligosilane Langmuir-Blodgett filmMARUYAMA, H ; KOSAI, N ; SATO, T ; SAGISAKA, S ; SEGAWA, H ; SHIMIDZU, T ; TANAKA, KJapanese Journal of Applied Physics, 1997, Vol.36 (12A), p.7312-7316 [Periódico revisado por pares]Tokyo: Japanese journal of applied physicsTexto completo disponível |
|
3 |
Material Type: Artigo
|
Changes in effective work function of HfxRu1-x alloy gate electrodeNABATAME, T ; NUNOSHIGE, Y ; KADOSHIMA, M ; TAKABA, H ; SEGAWA, K ; KIMURA, S ; SATAKE, H ; OTA, H ; OHISHI, T ; TORIUMI, AMicroelectronic engineering, 2008-07, Vol.85 (7), p.1524-1528 [Periódico revisado por pares]Amsterdam: Elsevier ScienceTexto completo disponível |
|
4 |
Material Type: Artigo
|
The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structureNABATAME, T ; SEGAWA, K ; KADOSHIMA, M ; TAKABA, H ; IWAMOTO, K ; KIMURA, S ; NUNOSHIGE, Y ; SATAKE, H ; OHISHI, T ; TORIUMI, AkiraMaterials science in semiconductor processing, 2006-12, Vol.9 (6), p.975-979 [Periódico revisado por pares]Oxford: Elsevier ScienceTexto completo disponível |
|
5 |
Material Type: Artigo
|
Efficient fabrication process for superconducting integrated circuits using photosensitive polyimide insulation layersKikuchi, K. ; Goto, M. ; Nakagawa, H. ; Segawa, S. ; Tokoro, K. ; Taino, T. ; Myoren, H. ; Takada, S. ; Aoyagi, M.IEEE transactions on applied superconductivity, 2005-06, Vol.15 (2), p.94-97 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
|
6 |
Material Type: Artigo
|
New fabrication process for Josephson tunnel junctions using photosensitive polyimide insulation layer for superconducting integrated circuitsKikuchi, K. ; Segawa, S. ; Eun-Sil Jung ; Nakagawa, H. ; Tokoro, K. ; Itatani, H. ; Aoyagi, M.IEEE transactions on applied superconductivity, 2003-06, Vol.13 (2), p.119-122 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
|
7 |
Material Type: Ata de Congresso
|
Interlayer dielectric process for LSI circuits using positive photosensitive polyimide synthesized by block-copolymerizationAoyagi, Masahiro ; Segawa, Shigemasa ; Jung, EunSil ; Itatani, Taro ; Komuro, Masanori ; Sakamoto, Tsuenenori ; Itatani, Hiroshi ; Miyamura, Masataka ; Matsumoto, ShunichiSPIE proceedings series, 2001, Vol.4345, p.1073-1078Bellingham WA: SPIETexto completo disponível |
|
8 |
Material Type: Artigo
|
Quarter-micrometer SPI (Self-aligned Pocket Implantation) MOSFET's and its application for low supply voltage operationHori, A. ; Hiroki, A. ; Nakaoka, H. ; Segawa, M. ; Hori, T.IEEE transactions on electron devices, 1995-01, Vol.42 (1), p.78-86 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
|
9 |
Material Type: Ata de Congresso
|
Performance of a chemically amplified positive resist for next-generation photomask fabricationKurihara, Masa-aki ; Segawa, Toshikazu ; Okuno, Daichi ; Hayashi, Naoya ; Sano, HisatakeSPIE proceedings series, 1998, Vol.3412, p.279-291Bellingham WA: SPIETexto completo disponível |
|
10 |
Material Type: Ata de Congresso
|
Influence of the c-axis orientation on the optical properties of thin CdS films formed by laser ablationDUSHKINA, N. M ; ULLRICH, B ; SAKAI, H ; EIJU, T ; SEGAWA, YSPIE proceedings series, 1999, p.424-432Bellingham WA: SPIETexto completo disponível |