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Stress investigation of PECVD dielectric layers for advanced optical MEMS
Stress investigation of PECVD dielectric layers for advanced optical MEMS
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Stress investigation of PECVD dielectric layers for advanced optical MEMS

Tarraf, A ; Daleiden, J ; Irmer, S ; Prasai, D ; Hillmer, H

Journal of micromechanics and microengineering, 2004-03, Vol.14 (3), p.317-323 [Periódico revisado por pares]

Bristol: IOP Publishing

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Multiple air-gap filters and constricted mesa lasers: material processing meets the front of optical device technology
Multiple air-gap filters and constricted mesa lasers: material processing meets the front of optical device technology
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Multiple air-gap filters and constricted mesa lasers: material processing meets the front of optical device technology

DALEIDEN, J ; HILLMER, H

Applied physics. B, Lasers and optics, 2003-07, Vol.76 (8), p.821-832 [Periódico revisado por pares]

Berlin: Springer

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3
Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices
Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices
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Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices

HILLMER, H ; DALEIDEN, J ; PROTT, C ; RÖMER, F ; IRMER, S ; RANGELOV, V ; TARRAF, A ; SCHÜLER, S ; STRASSNER, M

Applied physics. B, Lasers and optics, 2002-07, Vol.75 (1), p.3-13 [Periódico revisado por pares]

Berlin: Springer

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4
Surface micromachined optical low-cost all-air-gap filters based on stress-optimized Si3N4 layers
Surface micromachined optical low-cost all-air-gap filters based on stress-optimized Si3N4 layers
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Surface micromachined optical low-cost all-air-gap filters based on stress-optimized Si3N4 layers

Irmer, S ; Alex, K ; Daleiden, J ; Kommallein, I ; Oliveira, M ; Römer, F ; Tarraf, A ; Hillmer, H

Journal of micromechanics and microengineering, 2005-04, Vol.15 (4), p.867-872 [Periódico revisado por pares]

Bristol: IOP Publishing

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5
Chemically-assisted ion-beam etching of (AlGa)As/GaAs : lattice damage and removal by in-situ Cl2 treatment
Chemically-assisted ion-beam etching of (AlGa)As/GaAs : lattice damage and removal by in-situ Cl2 treatment
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Chemically-assisted ion-beam etching of (AlGa)As/GaAs : lattice damage and removal by in-situ Cl2 treatment

DALEIDEN, J ; KIEFER, R ; KLUSSMANN, S ; KUNZER, M ; MANZ, C ; WAILHER, M ; BRAUNSTEIN, J ; WEIMANN, G

Microelectronic engineering, 1999-02, Vol.45 (1), p.9-14 [Periódico revisado por pares]

Amsterdam: Elsevier Science

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6
Ultra-wide continuously tunable 1.55μm vertical air-cavity wavelength-selective elements for VCSEL's using micromachined electrostatic actuation
Ultra-wide continuously tunable 1.55μm vertical air-cavity wavelength-selective elements for VCSEL's using micromachined electrostatic actuation
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Ultra-wide continuously tunable 1.55μm vertical air-cavity wavelength-selective elements for VCSEL's using micromachined electrostatic actuation

HILLMER, H ; DALEIDEN, J ; PROTT, C ; RÖMER, F ; INNER, S ; ATARO, E ; TARRAF, A ; GUTERMUTH, D ; KOMMALLEIN, I ; STRASSNER, M

SPIE proceedings series, 2003, p.18-32

Bellingham WA: SPIE

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7
Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers
Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers
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Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers

Riemenschneider, Rolf ; Peerlings, Joachim ; Pfeiffer, Joachim ; Dehe, A ; Vogt, Andreas ; Meissner, Peter M ; Hartnagel, Hans L ; Chitica, N ; Daleiden, Juergen ; Streubel, Klaus P ; Kuenzel, Harald ; Goertz, W

SPIE proceedings series, 1998, Vol.3276, p.185-195

Bellingham WA: SPIE

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8
Novel low-cost and simple fabrication technology for tunable dielectric active and passive optical air-gap devices
Novel low-cost and simple fabrication technology for tunable dielectric active and passive optical air-gap devices
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Novel low-cost and simple fabrication technology for tunable dielectric active and passive optical air-gap devices

Tarraf, Amer ; Daleiden, Juergen ; Irmer, Soeren ; Rangelov, Ventzeslav ; Roemer, Friedhard ; Prott, Cornelia ; Ataro, Edwin ; Hillmer, Hartmut ; Fuhrmann, Thomas ; Spehr, Till ; Salbeck, Josef

SPIE proceedings series, 2003, Vol.4945, p.9-20

Bellingham WA: SPIE

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