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Impact on mask technology from the viewpoint of DRAM trend
Impact on mask technology from the viewpoint of DRAM trend
Material Type:
Ata de Congresso 		Adicionar ao Meu Espaço

Impact on mask technology from the viewpoint of DRAM trend

Koyama, Kuniaki

SPIE proceedings series, 1998, Vol.3412, p.10-17

Bellingham WA: SPIE

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2
A novel high performance planar InGaAs/InAlAs avalanche photodiode
A novel high performance planar InGaAs/InAlAs avalanche photodiode
Material Type:
Ata de Congresso 		Adicionar ao Meu Espaço

A novel high performance planar InGaAs/InAlAs avalanche photodiode

Levine, B. F ; Sacks, R. N ; Ko, J ; Jazwiecki, M ; Valdmanis, J. A ; Gunther, D ; Meier, J. H Luo, Yi ; Lee, Yong Hee ; Koyama, Fumio

Proceedings of SPIE, the International Society for Optical Engineering, 2006, Vol.6352, p.63521D-63521D-7

Bellingham WA: SPIE

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3
Advanced FIB mask repair technology for Arf lithography (3)
Advanced FIB mask repair technology for Arf lithography (3)
Material Type:
Ata de Congresso 		Adicionar ao Meu Espaço

Advanced FIB mask repair technology for Arf lithography (3)

HAGIWARA, Ryoji ; YASAKA, Anto ; AITA, Kazuo ; ADACHI, Tatsuya ; KUBO, Shinji ; YOSHIOKA, Nobuyuki ; MORIMOTO, Hiroaki ; MORIKAWA, Yasutaka ; IWASE, Kazuya ; HAYASHI, Naoya ; TAKAOKA, Osamu ; KOZAKAI, Tomokazu ; YABE, Satoru ; KOYAMA, Yoshihiro ; MURAMATSU, Masashi ; DOI, Toshio ; SUZUKI, Katsumi ; OKABE, Mamoru

SPIE proceedings series, 2001, p.555-562

Bellingham WA: SPIE

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4
Advanced FIB mask repair technology for 100nm/ArF lithography (2)
Advanced FIB mask repair technology for 100nm/ArF lithography (2)
Material Type:
Ata de Congresso 		Adicionar ao Meu Espaço

Advanced FIB mask repair technology for 100nm/ArF lithography (2)

HAGIWARA, Ryoji ; YASAKA, Anto ; MATSUDA, Osamu ; OKABE, Mamoru ; SHINOHARA, Shoji ; HASUDA, Masakatsu ; ADACHI, Tatsuya ; MORIKAWA, Yasutaka ; NISHIGUCHI, Masaharu ; SATO, Yasushi ; HAYASHI, Naoya ; OZAWA, Toshiya ; AITA, Kazuo ; TANAKA, Yoshihiro ; YOSHIOKA, Nobuyuki ; TAKAOKA, Osamu ; KOYAMA, Yoshihiro ; KOZAKAI, Tomokazu ; DOI, Toshio ; MURAMATSU, Masashi ; SUZUKI, Katsumi ; SUGIYAMA, Yasuhiko

SPIE proceedings series, 2003, p.510-519

Bellingham WA: SPIE

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5
A novel birefringent distributed Bragg reflector using a metal/dielectric polarizer for polarization control of surface-emitting lasers
A novel birefringent distributed Bragg reflector using a metal/dielectric polarizer for polarization control of surface-emitting lasers
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A novel birefringent distributed Bragg reflector using a metal/dielectric polarizer for polarization control of surface-emitting lasers

MUKAIHARA, T ; OHNOKI, N ; BABA, T ; KOYAMA, F ; IGA, K

Japanese Journal of Applied Physics, 1994, Vol.33 (2B), p.L227-L229 [Periódico revisado por pares]

Tokyo: Japanese journal of applied physics

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