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Electrical and optical properties of Si-rich SiNx layers: Effect of annealingP. Szollosi ; P. Basa ; Cs Ducso ; B Mate ; M. Adam ; T. Lohner ; P. Petrik ; B. Pecz ; L. Toth ; L. DobosCurrent Applied Physics, 2006, 6(2), , pp.179-181 [Periódico revisado por pares]한국물리학회Texto completo disponível |