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Hsu, T
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MEMS and microsystems design, manufacture, and nanoscale engineering
Tai-Ran Hsu
Hoboken, N.J. John Wiley c2008
Available at
FZEA - Fac. Zoot. Eng. de Alimentos
(TK7874 H873m 2008 )
(GetIt)
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Microeletrônica
Sistemas Microeletromecânicos
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