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MEMS and microsystems design, manufacture, and nanoscale engineering
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MEMS and microsystems design, manufacture, and nanoscale engineering

Tai-Ran Hsu

Hoboken, N.J. John Wiley c2008

Available at FZEA - Fac. Zoot. Eng. de Alimentos    (TK7874 H873m 2008 )(GetIt)

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