Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Artigo de Congresso
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Efeitos de "arrival rate" e de pressão de gás na composição de filmes de nitreto de titânio preparados com deposição assistida por feixe de íonsMasao Matsuoka 1949- Sadao Isotani; Jose Fernando Diniz Chubaci; Karina Carvalho Lopes; S Watanabe (Shigueo); Kiyoshi Ogata; Encontro Nacional de Física da Matéria Condensada (24. 2001 São Lourenço)Resumos São Paulo : SBF, 2001São Paulo SBF 2001Item não circula. Consulte sua biblioteca.(Acessar) |
2 |
Material Type: Artigo de Congresso
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Chemical bonding and composition of silicon nitride films prepared by inductively coupled plasma chemical vapor depositionMasao Matsuoka 1949- Sadao Isotani; Wilmer Alexe Sucasaire Mamani; Luís da Silva Zambom; Katsuhiko Ogata; International Workshop on Plasma-Based Ion Implantation and Deposition São José dos Campos, SP Brasil 2009 10thSurface & Coatings Technology v. 204, p.18-19, 2923-2927, 2010Amsterdam Elsevier Science 2010Acesso online |
3 |
Material Type: Artigo
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Effects of arrival rate and gas pressure on the chemical bonding and composition in titanium nitride films prepared on Si(100) substrates by ion beam and vapor depositionMasao Matsuoka 1949- Sadao Isotani; Juan Carlos Ramirez Mittani; Jose Fernando Diniz Chubaci; K Ogata; N KurataniJournal of Vacuum Science & Technology A v. 23, n. 1, p. 137-141, 2005New York 2005Acesso online |
4 |
Material Type: Artigo
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Effects of arrival rate and gas pressure on the chemical bonding and composition in titanium nitride films prepared on Si(100) substrates by ion beam and vapor depositionMasao Matsuoka 1949- Sadao Isotani; Juan Carlos Ramirez Mittani; Jose Fernando Diniz Chubaci; K Ogata; N KurataniJournal of Vacuum Science & Technology A v. 23, n. 1, p. 137-141, 2005New York 2005Acesso online |