Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
---|---|---|---|
1 |
Material Type: Ata de Congresso
|
![]() |
ICRF mode conversion in three-ion species heating experiment and in flow drive experiment on the Alcator C-Mod tokamakLin, Y. ; Wukitch, S.J. ; Edlund, E. ; Ennever, P. ; Hubbard, A. E. ; Porkolab, M. ; Rice, J. ; Wright, J. Hillairet, J.EPJ Web of Conferences, 2017, Vol.157, p.3030 [Periódico revisado por pares]Les Ulis: EDP SciencesTexto completo disponível |
2 |
Material Type: Ata de Congresso
|
![]() |
Characterization of CD-SEM metrology for iArF photoresist materialsBunday, Benjamin ; Cordes, Aaron ; Orji, N. G ; Piscani, Emil ; Cochran, Dan ; Byers, Jeff ; Allgair, John ; Rice, Bryan J ; Avitan, Yohanan ; Peltinov, Ram ; Bar-zvi, Maayan ; Adan, OferProceedings of SPIE, the International Society for Optical Engineering, 2008, Vol.6922, p.69221A-69221A-17Bellingham, Wash: SPIETexto completo disponível |
3 |
Material Type: Ata de Congresso
|
![]() |
Effects of processing parameters on line-width roughnessRice, Bryan J ; Cao, Heidi B ; Chandhok, Manish ; Meagley, Robert PProceedings of SPIE, 2003, Vol.5039, p.384-392SPIETexto completo disponível |
4 |
Material Type: Ata de Congresso
|
![]() |
One small step: world's first integrated EUVL process lineRoberts, Jeanette M ; Bacuita, Terence ; Bristol, Robert L ; Cao, Heidi B ; Chandhok, Manish ; Lee, Sang H ; Panning, Eric M ; Shell, Melissa ; Zhang, Guojing ; Rice, Bryan JProc. SPIE, 2005, Vol.5751, p.64-77SPIETexto completo disponível |
5 |
Material Type: Ata de Congresso
|
![]() |
Continuing 193nm optical lithography for 32nm imaging and beyondPiscani, Emil C ; Ashworth, Dominic ; Byers, Jeff ; Van Peski, Chris ; Zimmerman, Paul ; Rice, Bryan JProceedings of SPIE, the International Society for Optical Engineering, 2008, Vol.6924, p.69242I-69242I-12Bellingham, Wash: SPIETexto completo disponível |
6 |
Material Type: Ata de Congresso
|
![]() |
Sources of line-width roughness for EUV resistsCao, Heidi B ; Yueh, Wang ; Rice, Bryan J ; Roberts, Jeanette ; Bacuita, Terence ; Chandhok, ManishProceedings of SPIE, 2004, Vol.5376, p.757-764SPIETexto completo disponível |
7 |
Material Type: Ata de Congresso
|
![]() |
An overview of fault models and testing approaches for reversible logicRice, J. E.2013 IEEE Pacific Rim Conference on Communications, Computers and Signal Processing (PACRIM), 2013, p.125-130IEEETexto completo disponível |
8 |
Material Type: Ata de Congresso
|
![]() |
Characterization of flare on Intel’s EUV METLee, Sang Hun ; Chandhok, Manish ; Roberts, Jeanette ; Rice, Bryan JProc. SPIE, 2005, Vol.5751, p.293-300SPIETexto completo disponível |
9 |
Material Type: Ata de Congresso
|
![]() |
Development of hyperspectral image projectorsRice, J. P ; Brown, S. W ; Neira, J. EProceedings of SPIE, the International Society for Optical Engineering, 2006, Vol.6297, p.629701-629701-15Bellingham, Washington: SPIETexto completo disponível |
10 |
Material Type: Ata de Congresso
|
![]() |
Implementing flare compensation for EUV masks through localized mask CD resizingKrautschik, Christof G ; Chandhok, Manish ; Zhang, Guojing ; Lee, Sang Hun ; Goldstein, Michael ; Panning, Eric M ; Rice, Bryan J ; Bristol, Robert L ; Singh, VivekProceedings of SPIE, 2003, Vol.5037, p.58-68SPIETexto completo disponível |