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Plasma-ion beam source enhanced deposition systemLi, Guoqing ; Liu, Cui ; Li, Jianfeng ; Zhang, Chengwu ; Mu, Zongxin ; Long, ZhenhuSurface & coatings technology, 2005-04, Vol.193 (1), p.112-116 [Periódico revisado por pares]Lausanne: Elsevier B.VTexto completo disponível |