Effects of heavy boron doping upon oxygen precipitation in czochralski silicon
S Hahn F A Ponce; W A Tiller; Vivian Stojanoff; Douglas Anderson Pereira Bulla; W E Castro Junior
v.64, n.9 , p.4454-65, 1988 Journal of Applied Physics
1988
Item não circula. Consulte sua biblioteca.(Acessar)