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Journal Of Microelectromechanical Systems
| Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
|---|---|---|---|
| 1 |
Material Type: Artigo
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Electrostatic charge and field sensors based on micromechanical resonatorsRiehl, P.S. ; Scott, K.L. ; Muller, R.S. ; Howe, R.T. ; Yasaitis, J.A.Journal of microelectromechanical systems, 2003-10, Vol.12 (5), p.577-589 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 2 |
Material Type: Artigo
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A Novel Micromachined Claw Probe for the Electrical Testing of Microsolder BallTsou, Chingfu ; Lai, Tengshian ; Huang, ChenghanJournal of microelectromechanical systems, 2012-10, Vol.21 (5), p.1022-1031 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 3 |
Material Type: Artigo
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Adhesion release and yield enhancement of microstructures using pulsed Lorentz forcesGogoi, B.P. ; Mastrangelo, C.H.Journal of microelectromechanical systems, 1995-12, Vol.4 (4), p.185-192 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 4 |
Material Type: Artigo
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Silicon-based microelectrodes for neurophysiology fabricated using a gold metallization/nitride passivation systemEnsell, G. ; Banks, D.J. ; Ewins, D.J. ; Balachandran, W. ; Richards, P.R.Journal of microelectromechanical systems, 1996-06, Vol.5 (2), p.117-121 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 5 |
Material Type: Artigo
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Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolutionCheng-Hsien Liu ; Barzilai, A.M. ; Reynolds, J.K. ; Partridge, A. ; Kenny, T.W. ; Grade, J.D. ; Rockstad, H.K.Journal of microelectromechanical systems, 1998-06, Vol.7 (2), p.235-244 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 6 |
Material Type: Artigo
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Uncooled Infrared Detectors Using Gallium Nitride on Silicon Micromechanical ResonatorsGokhale, Vikrant J. ; Rais-Zadeh, MinaJournal of microelectromechanical systems, 2014-08, Vol.23 (4), p.803-810 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 7 |
Material Type: Artigo
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Characterization of Nontoxic Liquid-Metal Alloy Galinstan for Applications in MicrodevicesTingyi Liu ; Sen, P. ; Chang-Jin KimJournal of microelectromechanical systems, 2012-04, Vol.21 (2), p.443-450 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 8 |
Material Type: Artigo
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Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic ActuationYounis, Mohammad I ; Ouakad, Hassen M ; Alsaleem, Fadi M ; Miles, Ronald ; Weili CuiJournal of microelectromechanical systems, 2010-06, Vol.19 (3), p.647-656 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 9 |
Material Type: Artigo
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Optical MEMS: From Micromirrors to Complex SystemsSolgaard, Olav ; Godil, Asif A. ; Howe, Roger T. ; Lee, Luke P. ; Peter, Yves-Alain ; Zappe, HansJournal of microelectromechanical systems, 2014-06, Vol.23 (3), p.517-538 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
| 10 |
Material Type: Artigo
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Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric ModeChih-Ming Lin ; Yantchev, Ventsislav ; Jie Zou ; Yung-Yu Chen ; Pisano, Albert P.Journal of microelectromechanical systems, 2014-02, Vol.23 (1), p.78-91 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
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