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The formation of multi-axis micromechanical gyroscopes and accelerometers using surface micromachiningGusev, E Yu ; Jityaeva, J Y ; Bykov, Al VJournal of physics. Conference series, 2017-11, Vol.929 (1), p.12055 [Periódico revisado por pares]Bristol: IOP PublishingTexto completo disponível |