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Papers from the 16th International Vacuum Microelectronics Conference
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Papers from the 16th International Vacuum Microelectronics Conference

International Vacuum Microelectronics Conference (16th 2003 Osaka, Japan) Yasuhiko Gotoh; Junzo Ishikawa; Mikio Takai; William Goodhue; American Vacuum Society; North American Conference on Molecular Beam Epitaxy (21st 2003 Keystone, Colo.)

Issued as: Journal of vacuum science & technology. B, Microelectronics and nanometer structures 2nd ser., v. 22, no. 3 (May/June 2004)

New York Published by AVS through the American Institute of Physics c2004

Localização: IF - Instituto de Física    (J.Vac.Sci.Technol.B v.22 n.3 )(Acessar)

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