Effect of oxygen additive on microwave plasma for diamond film synthesis by the plasma impedance measurement
H Miyake K I Sugahara; T Kobayashi; K Kondo; M Taniguchi; M Sugiyo
Tokyo v.35, n.7b pt.2, p.l933-6, 1996 Japanese Journal Applied Physics
Tokyo 1996
Item não circula. Consulte sua biblioteca.(Acessar)