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The effect of device fabrication on quasi-static elastic behaviour of silicon nanocantilever arraysGleeson, Peter ; Lin, Kevin ; Potie, Alexis ; Pawashe, Chytra ; P de Silva, Johann ; Cross, Graham L W ; Boland, John JJournal of micromechanics and microengineering, 2015-12, Vol.25 (12), p.125007-7 [Periódico revisado por pares]IOP PublishingTexto completo disponível |