Characteristic of silicon etching process in a RIE reactor modified to include a built-in radio frequency excitation coil. (em CD-Rom)
Marcos Massi Ronaldo Domingues Mansano 1964-; Homero Santiago Maciel; Patrick Bernard Verdonck 1958-; Conference of the Brazilian Microelectronics Society (12. 1997 Caxambu)
Proceedings Itajubá : SBMICRO/EFEI, 1997
Itajubá SBMICRO/EFEI 1997
Item não circula. Consulte sua biblioteca.(Acessar)
The influence of additives on electrical characteristics of DLC films deposited by reactive sputtering
Ronaldo Domingues Mansano 1964- Ana Paula Mousinho; Luís da Silva Zambom; Marina Sparvoli de Medeiros; Patrick Bernard Verdonck 1958-; M Guerino; Marcos Massi; International Symposium on Microelectronics Technology and Devices SBMICRO (19. 2004 Porto de Galinhas)
Santos, E. J. B.; Ribas, R. P.; Swart, J. eds Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03 Pennington : The Electrochemical Society, 2004
Pennington The Electrochemical Society 2004
Item não circula. Consulte sua biblioteca.(Acessar)
Influence of methane addition on the characteristics of magnetron sputtered hydrogenated carbon films
Ronaldo Domingues Mansano 1964- Paula Maria Nogueira; Luís da Silva Zambom; Patrick Bernard Verdonck 1958-; Marcos Massi; Homero Santiago Maciel; International Conference on Microelectronics and Packaging (14. 1999 Campinas)
ICMP 99: technical digest São Paulo : SBMicro/IMAPS, 1999
São Paulo SBMicro/IMAPS 1999
Item não circula. Consulte sua biblioteca.(Acessar)
The applicability of Langmuir probes for end point detection of polymer etching
Ronaldo Domingues Mansano 1964- Paula Maria Nogueira; Luís da Silva Zambom; Patrick Bernard Verdonck 1958-; Marcos Massi; Homero Santiago Maciel; International Conference on Microelectronics and Packaging (14. 1999 Campinas)
ICMP 99: technical digest São Paulo : SBMicro/IMAPS, 1999
São Paulo SBMicro/IMAPS 1999
Item não circula. Consulte sua biblioteca.(Acessar)
Use of diamond-like carbon with tungsten (W-DLC) films for orthopedics implants
Luís Henrique Garcia-Amoedo Terezinha de Jesus Andreoli Pinto; Luís da Silva Zambom; Ana Paula Mousinho; Ronaldo Domingues Mansano 1964-; Marcos Massi; Ronaldo Ruas; Encontro da Sociedade Brasileira de Pesquisas em Materiais (5 2006 Florianópolis, SC); Brazilian MRS Meeting (5 2006 Florianópolis, SC)
Final Program Rio de Janeiro : SBPMat, 2006
Rio de Janeiro SBPMat 2006
Item não circula. Consulte sua biblioteca.(Acessar)