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Refinado por: assunto: Metrology remover
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Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy
Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy
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Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy

SILVER, R. M ; ZHANG, N. F ; BARNES, B. M ; ZHOU, H ; QIN, J ; DIXSON, R

Proceedings of SPIE, the International Society for Optical Engineering, 2011, Vol.7971

Bellingham, Wash: SPIE

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2
A Bayesian Statistical Model for Hybrid Metrology to Improve Measurement Accuracy
A Bayesian Statistical Model for Hybrid Metrology to Improve Measurement Accuracy
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A Bayesian Statistical Model for Hybrid Metrology to Improve Measurement Accuracy

SILVER, R. M ; ZHANG, N. F ; BAMES, B. M ; QIN, J ; ZHOU, H ; DIXSON, R

Proceedings of SPIE, the International Society for Optical Engineering, 2011, Vol.8083

Bellingham, Wash: SPIE

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3
Reference metrology using a next-generation CD-AFM
Reference metrology using a next-generation CD-AFM
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Reference metrology using a next-generation CD-AFM

Dixson, Ronald ; Guerry, Angela

Proceedings of SPIE, 2004, Vol.5375, p.633-646

SPIE

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4
CD-AFM reference metrology at NIST and SEMATECH
CD-AFM reference metrology at NIST and SEMATECH
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CD-AFM reference metrology at NIST and SEMATECH

Dixson, Ronald ; Fu, Joseph ; Orji, Ndubuisi ; Guthrie, William ; Allen, Richard ; Cresswell, Michael

Proc. SPIE, 2005, Vol.5752, p.324-336

Bellingham WA: SPIE

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5
Implementation of Reference Measurement System using CD-AFM
Implementation of Reference Measurement System using CD-AFM
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Implementation of Reference Measurement System using CD-AFM

Dixson, Ronald G ; Guerry, Angela ; Bennett, Marylyn H ; Vorburger, Theodore V ; Bunday, Benjamin D

Proceedings of SPIE, 2003, Vol.5038, p.150-165

SPIE

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6
Comparison of SEM and HRTEM CD Measurements Extracted From Test Structures Having Feature Linewidths From 40 to 240 nm
Comparison of SEM and HRTEM CD Measurements Extracted From Test Structures Having Feature Linewidths From 40 to 240 nm
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Comparison of SEM and HRTEM CD Measurements Extracted From Test Structures Having Feature Linewidths From 40 to 240 nm

Cresswell, M.W. ; Allen, R.A. ; Guthrie, W.F. ; Murabito, C.E. ; Dixson, R.G. ; Hunt, A.

IEEE transactions on instrumentation and measurement, 2008-01, Vol.57 (1), p.100-109 [Periódico revisado por pares]

New York: IEEE

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7
Toward traceability for at-line AFM dimensional metrology
Toward traceability for at-line AFM dimensional metrology
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Toward traceability for at-line AFM dimensional metrology

Dixson, Ronald G ; Guerry, Angela ; Bennett, Marylyn H ; Vorburger, Theodore V ; Postek, Michael T

SPIE proceedings series, 2002, Vol.4689, p.313-335

Bellingham WA: SPIE

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8
Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks
Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks
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Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks

Smith, S. ; Tsiamis, A. ; McCallum, M. ; Hourd, A.C. ; Stevenson, J.T.M. ; Walton, A.J. ; Dixson, R.G. ; Allen, R.A. ; Potzick, J.E. ; Cresswell, M.W. ; Orji, N.G.

IEEE transactions on semiconductor manufacturing, 2009-02, Vol.22 (1), p.72-79 [Periódico revisado por pares]

New York, NY: IEEE

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9
The role of periodic interferometer errors in the calibration of capacitance displacement sensors for nanometrology applications
The role of periodic interferometer errors in the calibration of capacitance displacement sensors for nanometrology applications
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The role of periodic interferometer errors in the calibration of capacitance displacement sensors for nanometrology applications

Köning, R ; Dixson, R ; Fu, J ; Vorburger, T V

Measurement science & technology, 2001-11, Vol.12 (11), p.2002-2008 [Periódico revisado por pares]

Bristol: IOP Publishing

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10
Silicon single atom steps as AFM height standards
Silicon single atom steps as AFM height standards
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Silicon single atom steps as AFM height standards

Dixson, Ronald G ; Orji, Ndubuisi G ; Fu, Joseph ; Tsai, Vincent ; Williams, Ellen D ; Kacker, Raghu ; Vorburger, Theodore V ; Edwards, Hal L ; Cook, Debra ; West, Paul E ; Nyffenegger, Ralph

SPIE proceedings series, 2001, Vol.4344, p.157-168

Bellingham WA: SPIE

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