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1
Morphology and properties of sputtered (Ti,Al)N layers on high speed steel substrates as a function of deposition temperature and sputtering atmosphere
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Morphology and properties of sputtered (Ti,Al)N layers on high speed steel substrates as a function of deposition temperature and sputtering atmosphere

Jehn, Hermann A. ; Hofmann, Siegfried ; Rückborn, Vera‐Ellen ; Münz, Wolf‐Dieter

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1986-11, Vol.4 (6), p.2701-2705 [Periódico revisado por pares]

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2
On structure and properties of sputtered Ti and Al based hard compound films
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On structure and properties of sputtered Ti and Al based hard compound films

Knotek, O. ; Böhmer, M. ; Leyendecker, T.

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1986-11, Vol.4 (6), p.2695-2700 [Periódico revisado por pares]

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3
Properties of (Ti1−x Al x )N coatings for cutting tools prepared by the cathodic arc ion plating method
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Properties of (Ti1−x Al x )N coatings for cutting tools prepared by the cathodic arc ion plating method

Tanaka, Y. ; Gür, T. M. ; Kelly, M. ; Hagstrom, S. B. ; Ikeda, T. ; Wakihira, K. ; Satoh, H.

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1992-07, Vol.10 (4), p.1749-1756 [Periódico revisado por pares]

MELVILLE: A V S Amer Inst Physics

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4
Deposition and properties of polycrystalline TiN/NbN superlattice coatings
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Deposition and properties of polycrystalline TiN/NbN superlattice coatings

Chu, X. ; Wong, M. S. ; Sproul, W. D. ; Rohde, S. L. ; Barnett, S. A.

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1992-07, Vol.10 (4), p.1604-1609 [Periódico revisado por pares]

WOODBURY: Amer Inst Physics

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5
(Ti1−x Al x )N coatings by plasma‐enhanced chemical vapor deposition
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(Ti1−x Al x )N coatings by plasma‐enhanced chemical vapor deposition

Lee, Sang‐Hyeob ; Ryoo, Ho‐Joon ; Lee, Jung‐Joong

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1994-07, Vol.12 (4), p.1602-1607 [Periódico revisado por pares]

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6
Multilayer, multicomponent, and multiphase physical vapor deposition coatings for enhanced performance
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Multilayer, multicomponent, and multiphase physical vapor deposition coatings for enhanced performance

Sproul, William D.

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1994-07, Vol.12 (4), p.1595-1601 [Periódico revisado por pares]

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7
Compositionally gradient (Ti1−x Al x )N coatings made by plasma enhanced chemical vapor deposition
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Compositionally gradient (Ti1−x Al x )N coatings made by plasma enhanced chemical vapor deposition

Lee, Sang‐Hyeob ; Lee, Jung‐Joong

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1995-07, Vol.13 (4), p.2030-2034 [Periódico revisado por pares]

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8
Multilayered (Ti, Al) ceramic coating for high-speed machining applications
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Multilayered (Ti, Al) ceramic coating for high-speed machining applications

Zeng, X. T. ; Zhang, Sam ; Tan, L. S.

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2001-07, Vol.19 (4), p.1919-1922 [Periódico revisado por pares]

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9
Plasma-enhanced chemical-vapor deposition of titanium aluminum carbonitride/amorphous-carbon nanocomposite thin films
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Plasma-enhanced chemical-vapor deposition of titanium aluminum carbonitride/amorphous-carbon nanocomposite thin films

Shieh, Jiann ; Hon, Min Hsiung

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2002-01, Vol.20 (1), p.87-92 [Periódico revisado por pares]

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10
Plasma-based physical vapor deposition surface engineering processes
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Plasma-based physical vapor deposition surface engineering processes

Matthews, Allan

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2003-09, Vol.21 (5), p.S224-S231 [Periódico revisado por pares]

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