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Spectral examination of the "loading" effect while removing the photoresist coatings from the substrate surfaces in the microwave plasma discharge
Spectral examination of the "loading" effect while removing the photoresist coatings from the substrate surfaces in the microwave plasma discharge
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Spectral examination of the "loading" effect while removing the photoresist coatings from the substrate surfaces in the microwave plasma discharge

Bordusov, S.V.

2000 10th International Crimean Microwave Conference. "Microwave and Telecommunication Technology". Conference Proceedings (IEEE Cat. No.00EX415), 2000, p.436-437

IEEE

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