skip to main content
Idioma:
Refinado por: tipo de recurso: Anais de Congresso remover Institute of Physics Journals remover
Result Number Material Type Add to My Shelf Action Record Details and Options
1
Novel Hybrid Abrasive Particles for Oxide CMP Applications
Novel Hybrid Abrasive Particles for Oxide CMP Applications
Material Type:
Ata de Congresso 		Adicionar ao Meu Espaço

Novel Hybrid Abrasive Particles for Oxide CMP Applications

Mudhivarthi, Subrahmanya R. ; Coutinho, Cecil ; Kumar, Ashok ; Gupta, Vinay

ECS transactions, 2007, Vol.3 (41), p.9-19

Texto completo disponível

Citações Citado por
2
From Computational Lithography to Computational Inspection: Inverse Lithography Technology (ILT) and Inverse Inspection Technology (IIT)
From Computational Lithography to Computational Inspection: Inverse Lithography Technology (ILT) and Inverse Inspection Technology (IIT)
Material Type:
Ata de Congresso 		Adicionar ao Meu Espaço

From Computational Lithography to Computational Inspection: Inverse Lithography Technology (ILT) and Inverse Inspection Technology (IIT)

Pang, Linyong ; Peng, Danping ; Hu, Peter ; Chen, Dongxue ; Cecil, Tom ; He, Lin ; Xiao, Guangming ; Tolani, Vikram ; Dam, Thuc ; Baik, KiHo ; Gleason, Bob

ECS transactions, 2010, Vol.27 (1), p.433-442

Texto completo disponível

Citações Citado por

Personalize Seus Resultados

  1. Editar

Refine Search Results

Expandir Meus Resultados

  1.   

Data de Publicação 

De até
Refinar

  • Realização: ABCD-USP USP   Logos de Redes Sociais: Freepik

Buscando em bases de dados remotas. Favor aguardar.