Polymers for microelectronics resists and dielectrics
L. F Thompson 1944-; C. G Willson 1939- (C. Grant); Seiichi Tagawa; AmericanChemicalSociety Division of Polymeric Materials: Science and Engineering; AmericanChemicalSocietyMeeting (1992 San Francisco, Calif.)
Washington, DC AmericanChemicalSociety 1994
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