Materials for microlithography radiation-sensitive polymers

L. F Thompson 1944-; C. G Willson 1939- (C. Grant); J. M. J Fréchet; American Chemical Society Division of Polymeric Materials: Science and Engineering; American Chemical Society Division of Polymer Chemistry; American Chemical Society Meeting (1984 Saint Louis, Mo.)

Washington, D.C. The Society 1984

Localização: EPBC - Esc. Politécnica-Bib Central    (621.3.049.75 T375m )(Acessar)