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Micro/nano-mechanical sensors and actuators based on SOI-MEMS technologyDao, Dzung Viet ; Nakamura, Koichi ; Bui, Tung Thanh ; Sugiyama, SusumuAdvances in natural sciences. Nanoscience and nanotechnology, 2010-03, Vol.1 (1), p.013001 [Periódico revisado por pares]IOP PublishingTexto completo disponível |