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Material Type: Artigo
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Ion energies delivered by negative and positive ionization waves to flat dielectric surfacesBabaeva, Natalia Yu ; Naidis, George VPlasma sources science & technology, 2020-09, Vol.29 (9), p.95020 [Periódico revisado por pares]IOP PublishingTexto completo disponível |
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Material Type: Artigo
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Study on atomic layer etching of Si in inductively coupled Ar/Cl2 plasmas driven by tailored bias waveformsMA, Xiaoqin ; ZHANG, Saiqian ; DAI, Zhongling ; WANG, YounianPlasma science & technology, 2017-08, Vol.19 (8) [Periódico revisado por pares]IOP PublishingTexto completo disponível |
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Material Type: Artigo
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Advanced Fluid Information. Plasma Molding over Surface TopographyKIM, Doosik ; ECONOMOU, Demetre J.JSME international journal. Series B, Fluids and thermal engineering, 2002, Vol.45 (1), p.117-122 [Periódico revisado por pares]Texto completo disponível |
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Material Type: Artigo
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Plasma Molding over Surface TopographyKIM, Doosik ; ECONOMOU, Demetre J.JSME International Journal Series B Fluids and Thermal Engineering, 2002, Vol.45(1), pp.117-122 [Periódico revisado por pares]Tokyo: The Japan Society of Mechanical EngineersTexto completo disponível |