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1
Ion energies delivered by negative and positive ionization waves to flat dielectric surfaces
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Artigo
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Ion energies delivered by negative and positive ionization waves to flat dielectric surfaces

Babaeva, Natalia Yu ; Naidis, George V

Plasma sources science & technology, 2020-09, Vol.29 (9), p.95020 [Periódico revisado por pares]

IOP Publishing

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2
Study on atomic layer etching of Si in inductively coupled Ar/Cl2 plasmas driven by tailored bias waveforms
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Study on atomic layer etching of Si in inductively coupled Ar/Cl2 plasmas driven by tailored bias waveforms

MA, Xiaoqin ; ZHANG, Saiqian ; DAI, Zhongling ; WANG, Younian

Plasma science & technology, 2017-08, Vol.19 (8) [Periódico revisado por pares]

IOP Publishing

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3
Advanced Fluid Information. Plasma Molding over Surface Topography
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Advanced Fluid Information. Plasma Molding over Surface Topography

KIM, Doosik ; ECONOMOU, Demetre J.

JSME international journal. Series B, Fluids and thermal engineering, 2002, Vol.45 (1), p.117-122 [Periódico revisado por pares]

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4
Plasma Molding over Surface Topography
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Artigo
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Plasma Molding over Surface Topography

KIM, Doosik ; ECONOMOU, Demetre J.

JSME International Journal Series B Fluids and Thermal Engineering, 2002, Vol.45(1), pp.117-122 [Periódico revisado por pares]

Tokyo: The Japan Society of Mechanical Engineers

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