Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications 24 October, 1995, Austin, Texas
Wayne E Bailey; M. Edward Motamedi; Fang-Chen Luo; Semiconductor Equipment and Materials International; National Instituteof Standards and Technology (U.S.); Society of Photo-optical Instrumentation Engineers
Bellingham, Wash. SPIE c1995
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