Less Energetic Routes for the Production of SiOx Films from Tris(dimethylamino)silane by Plasma Enhanced Atomic Layer Deposition

Spigarollo, Danielle C. F. S. ; Getnet, Tsegaye Gashaw ; Rangel, Rita C. C. ; Silva, Tiago F. ; Cruz, Nilson C. ; Rangel, Elidiane Cipriano

Coatings (Basel), 2023-10, Vol.13 (10), p.1730 [Periódico revisado por pares]

Basel: MDPI AG

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