Idioma:

Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (50th : 2006 : Baltimore, Md.) Shalom J Wind; American Vacuum Society.; IEEE Electron Devices Society.; Optical Society of America.

Localização: IF - Instituto de Física (J.Vac.Sci.Technol.A v.24 n.6 )(Acessar)

Título:
Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Autor: International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (50th : 2006 : Baltimore, Md.)
Shalom J Wind; American Vacuum Society.; IEEE Electron Devices Society.; Optical Society of America.
Assuntos: Photolithography -- Congresses; Lithography, Electron beam -- Congresses; Ion beam lithography -- Congresses; X-ray lithography -- Congresses; Nanotechnology -- Congresses; NANOTECNOLOGIA (CONGRESSOS)
Notas: Includes bibliographical references.
Editor: Melville, N.Y. : AVS through the American Institute of Physics
Data de criação/publicação: c2006
Formato: A22, L27-30, p. 2485-3363 : ill. ; 28 cm..
Idioma: Inglês

Links

Voltar para lista de resultados

Anterior Resultado 2 Avançar Ir para próxima página