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Papers from the 16th Workshop on Dielectrics in Microelectronics (WoDiM) : 28-30 June 2010, Bratislav, Slovakia

Workshop on Dielectrics in Microelectronics (16th : 2010 : Bratislava, Slovakia) American Vacuum Society.

Journal of vacuum science & technology. B, Microelectronics and nanometer 2nd ser., v. 29, no. 1 (Jan./Feb. 2011), p. 208-555

Localização: IF - Instituto de Física (J. Vac. Sci. Technol. B 2.nd Series v.29 n.1, 2011 )(Acessar)

Título:
Papers from the 16th Workshop on Dielectrics in Microelectronics (WoDiM) : 28-30 June 2010, Bratislav, Slovakia
Autor: Workshop on Dielectrics in Microelectronics (16th : 2010 : Bratislava, Slovakia)
American Vacuum Society.
Assuntos: Dielectrics -- Congresses; Microelectronics -- Congresses; Metal oxide semiconductors -- Congresses; DIELÉTRICOS (CONGRESSOS); MICROELETRÔNICA (CONGRESSOS)
É parte de: Journal of vacuum science & technology. B, Microelectronics and nanometer 2nd ser., v. 29, no. 1 (Jan./Feb. 2011), p. 208-555
Editor: New York : Published by AVS through the American Institute of Physics
Data de criação/publicação: 2011
Idioma: Inglês

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