Ion Energy and Angular Distribution in Biased Inductively Coupled Ar/O2 Discharges by Using a Hybrid Model

Wen, De‐Qi ; Zhang, Yu‐Ru ; Lieberman, Michael A. ; Wang, You‐Nian

Plasma processes and polymers, 2017-04, Vol.14 (4-5), p.n/a [Periódico revisado por pares]

Weinheim: Wiley Subscription Services, Inc

Texto completo disponível