Optical properties of silicon nanocrystallites in polycrystalline silicon films prepared at low temperature by plasma-enhanced chemical vapor deposition

MILOVZOROV, D. E ; ALI, A. M ; INOKUMA, T ; KURATA, Y ; SUZUKI, T ; HASEGAWA, S

Thin solid films, 2001, Vol.382 (1-2), p.47-55 [Periódico revisado por pares]

Lausanne: Elsevier Science

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