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Path difference measurement using phase stepping with white light

BARRON, R. J. ; SOMERVELL, A. R. D. ; HASKELL, T. G. ; BARNES, T. H. ; HERBER, A.

Journal of modern optics, 2002-08, Vol.49 (10), p.1717-1730 [Periódico revisado por pares]

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Título:
Path difference measurement using phase stepping with white light
Autor: BARRON, R. J. ; SOMERVELL, A. R. D. ; HASKELL, T. G. ; BARNES, T. H. ; HERBER, A.
Assuntos: Exact sciences and technology ; Fundamental areas of phenomenology (including applications) ; Imaging and optical processing ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Interferometers ; Optical instruments, equipment and techniques ; Optics ; Phase retrieval ; Physics
É parte de: Journal of modern optics, 2002-08, Vol.49 (10), p.1717-1730
Descrição: Phase stepping algorithms are commonly used with narrow bandwidth sources for fast accurate measurement of interferometer phase differences. We show that path difference can also be measured using phase stepping with a wide bandwidth source. The errors resulting from the spectral characteristics of the source are discussed and shown to be relatively small, allowing measurement of path difference to typically 0.1 μm or better. White-light phase stepping is demonstrated experimentally with results which closely match those predicted theoretically.
Editor: London: Taylor & Francis Group
Idioma: Inglês

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