An efficient way to evidence and to measure the metal ions fraction in high power impulse magnetron sputtering (HiPIMS) post- discharge with Pt, Au, Pd and mixed targets

Cuynet, Stéphane ; Lecas, Thomas ; Caillard, Amael ; Brault, Pascal

Journal of plasma physics, 2016, Vol.82 (6) [Periódico revisado por pares]

Cambridge University Press (CUP)

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