Effect of Al 2 O 3 thickness and oxidant precursors on the interface composition and contamination in Al 2 O 3 /GaN structures

Spelta, Tarek ; Martinez, Eugénie ; Veillerot, Marc ; Fernandes Paes Pinto Rocha, Pedro ; Vauche, Laura ; Salem, Bassem ; Hyot, Bérangère

Surface and interface analysis, 2024-07, Vol.56 (7), p.399-407 [Periódico revisado por pares]

Wiley-Blackwell

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