Sputter depth profiling by secondary ion mass spectrometry coupled with sample current measurements

Bardi, U. ; Chenakin, S.P. ; Lavacchi, A. ; Pagura, C. ; Tolstogouzov, A.

Applied surface science, 2006-08, Vol.252 (20), p.7373-7382 [Periódico revisado por pares]

Amsterdam: Elsevier B.V

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