Modified Control Charts Monitoring Long-Term Semiconductor Manufacturing Processes

de Souza, Jorge M. ; de Holanda, Giovanni M. ; Henriques, Hingmar A. ; Furukawa, Rafael H. Saotome, Osamu ; Gomes de Oliveira, Gabriel ; Mendes de Seixas, Ana Claudia ; Iano, Yuzo ; Kemper, Guillermo

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Cham: Springer International Publishing

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