A new high-temperature plasma immersion ion implantation system with electron heating
Oliveira, R.M. ; Gonçalves, J.A.N. ; Ueda, M. ; Rossi, J.O. ; Rizzo, P.N.
Surface & coatings technology, 2010-06, Vol.204 (18), p.3009-3012 [Periódico revisado por pares]Amsterdam: Elsevier B.V
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