Defect Passivation and Reliability Enhancement by Low-Temperature-High-Pressure Hydrogenation in LDMOS with 0.13-μm Bipolar-CMOS-DMOS Technology

Hung, Wei-Chieh ; Hung, Wei-Chun ; Chang, Ting-Chang ; Tu, Yu-Fa ; Chen, Min-Chen ; Yeh, Chien-Hung ; Kuo, Hung-Ming ; Lee, Ya-Huan ; Yen, Wei-Ting ; Liang, Fu-Chen

IEEE electron device letters, 2023-05, Vol.44 (5), p.1-1 [Periódico revisado por pares]

New York: IEEE

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