ZrO2-HfO2 Superlattice Ferroelectric Capacitors With Optimized Annealing to Achieve Extremely High Polarization Stability

Liang, Yan-Kui ; Li, Wei-Li ; Wang, Yong-Jyun ; Peng, Li-Chi ; Lu, Chun-Chieh ; Huang, Huai-Ying ; Yeong, Sai Hooi ; Lin, Yu-Ming ; Chu, Ying-Hao ; Chang, Edward-Yi ; Lin, Chun-Hsiung

IEEE electron device letters, 2022-09, Vol.43 (9), p.1451-1454 [Periódico revisado por pares]

New York: IEEE

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