KrF excimer laser annealing with an ultra-low laser fluence for enabling ferroelectric Hf0.5Zr0.5O2

Chen, Li ; Song, Wendong ; Wang, Weijie ; Lee, Hock Koon ; Chen, Zhixian ; Zhao, Wenting ; Zhu, Yao

IEEE electron device letters, 2023-01, p.1-1 [Periódico revisado por pares]

IEEE

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