Comparative study of annealing and oxidation effects in a-SiC:H and a-SiC thin films deposited by radio-frequency magnetron sputtering

Vasin, A.V. ; Muto, Sh ; Ishikawa, Yu ; Rusavsky, A.V. ; Kimura, T. ; Lysenko, V.S. ; Nazarov, A.N.

Thin solid films, 2011-01, Vol.519 (7), p.2218-2224 [Periódico revisado por pares]

Amsterdam: Elsevier B.V

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